KMID : 1059519970410110594
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Journal of the Korean Chemical Society 1997 Volume.41 No. 11 p.594 ~ p.599
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RF Sputtered Lithium Nickel Oxide Films and Their Electrochromism
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Kim Young-Il
Kim Bae-Whan Choy Jin-Ho Campet Guy Park Nam-Gyu Portier Josik Morel Bertrand
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Abstract
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RF½ºÆÛÅ͸µ¹ýÀ» ½á¼ Li2xNi1-xO ¹Ú¸·À» Á¦Á¶ÇÏ¿´À¸¸ç, ±× °úÁ¤¿¡¼ ±âÆÇÀÇ ¿Âµµ(50/230C)¿Í ºÐÀ§±â(Ar/O2)¸¦ º¯¼ö·Î½á ¸·ÀÇ ¹Ì¼¼±¸Á¶¸¦ Á¶ÀýÇÏ¿´´Ù. Åõ°úÀüÀÚÇö¹Ì°æÀ» ÀÌ¿ëÇÑ ¸·±¸Á¶ ºÐ¼®¿¡ ÀÇÇØ ³·Àº ±âÆÇ ¿Âµµ¿Í O2 Á¶°Ç¿¡¼ ¸·ÀÇ Á¶¼ºÀÔÀÚ°¡ ÀÛ¾ÆÁüÀ» °üÂûÇÏ¿´°í,50C/O2 ÇÏ¿¡¼ ¾ò¾îÁø Li2xNi1-xO ¹Ú¸·Àº ¾à 80A Å©±âÀÇ ÀÔÀÚ·Î ÀÌ·ç¾îÁ® ÀÖ¾ú´Ù. Àü±âÈÇÐÀû Á¶°Ç ÇÏ¿¡¼ Li2xNi1-xO ¹Ú¸·ÀÇ º¯»öÇö»ó¿Ã Á¶»çÇÑ °á°ú, ¹Ú¸·ÀÇ ¹Ì¼¼±¸Á¶ ¹ß´Þ¿¡ ÀÇÇØ Li+ ÀÌ¿ÂÀÇ °¡¿ªÀû ¼ö¿ë·®ÀÌ Áõ°¡ÇÏ°í, °á°úÀûÀ¸·Î Àü±âº¯»ö ±â´ÉÀÌ Çâ»óµÊÀ» ¾Ë ¼ö ÀÖ¾ú´Ù. 50¡£C/O2 ÇÏ¿¡¼ ¾ò¾îÁø 170nmµÎ²²ÀÇ Li2xNi1-xO ¹Ú¸·Àº 30mC/cm2ÀÇ Li+ÀÌ¿Â ¼ö¿ë·Â°ú ÇÔ²² ¾à1.3ÀÇ Èí±¤¹Ðµµ(OD)¸¦ ³ªÅ¸³»¾ú´Ù.
Lithium nickel oxide (Li2xNi1-xO) thin films have been prepared by the RF sputtering of lithiated nickel oxide target, where the film microstructure was controlled by the sputtering atmosphere (Ar/O2) and the substrate temperature (Ts=50/230 ¡É). From the transmission electron microscopic analysis, it is found that the most porous film with the grain size of ¡80 ¡Ê could be fabricated under the sputtering atmosphere of P(O2)=8¡¿10-2 mbar with the Ts=50 ¡É. In the optical and electrochemical studies, the Li2xNi1-xO films exhibit a significant electrochromic property in association with the lithium insertion/deinsertion process. The amount of charge insertion (Qi) and the optical density (OD) variation depend on the crystallinity of the film as well as its thickness, and for the Li2xNi1-xO film (170 nm thickness) prepared under O2 atmosphere and Ts=50 ¡É, the OD could be increased up to ¡1.3 by the charge insertion with Qi=30 mC/cm2.
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KEYWORD
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